▶       RF/DC Magnetron Sputtering System
  Model : KVS - 660. 2" Target, 3 Guns, Sunstrate Temp.: 800℃
  Ceramic and Metal Thin-Film Deposition
 
  ▶       Thermal Evaporator
  Model : KVT - 460. 3" Target, Substrate Temp. : 800℃
  Ceramic and Metal Thin- Film Deposition
 
  ▶      Press
  Model : Carver 3912.
  Uniaxial Cold Press : Power Sample Formation
 
  ▶      Climatic Chmaber
  Model : VC 4018, Temp. : -40 ~ 180℃
  Relative Humidity : 0 ~ 99%, Various Environments tests
 
  ▶      Impedance Analyzer
  Model : Solatrin 1260A, Frequency : 5 mHz ~ 30 MHz ; AC Electrical
  Conductivity Measurements and Interfacial Charaterization
 
  ▶      Four Point Probe
  Model : CMT- SR1000N
  Measurements for Sheet Resistance of Thin/Thick Films
 
  ▶      Electric Furnaces
  1) Box Furnace : Lindberg, 1700℃ , 2) Tube furnace : 1500℃
 
  ▶      Dry Ovens
  1) Vacuum Dry Oven : 180℃, 2) Dty Oven : 250℃
 
Equipment
주요장비
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