▶ RF/DC Magnetron Sputtering System
Model : KVS - 660. 2" Target, 3 Guns, Sunstrate Temp.: 800℃
Ceramic and Metal Thin-Film Deposition
▶ Thermal Evaporator
Model : KVT - 460. 3" Target, Substrate Temp. : 800℃
Ceramic and Metal Thin- Film Deposition
▶ Press
Model : Carver 3912.
Uniaxial Cold Press : Power Sample Formation
▶ Climatic Chmaber
Model : VC 4018, Temp. : -40 ~ 180℃
Relative Humidity : 0 ~ 99%, Various Environments tests
▶ Impedance Analyzer
Model : Solatrin 1260A, Frequency : 5 mHz ~ 30 MHz ; AC Electrical
Conductivity Measurements and Interfacial Charaterization
▶ Four Point Probe
Model : CMT- SR1000N
Measurements for Sheet Resistance of Thin/Thick Films
▶ Electric Furnaces
1) Box Furnace : Lindberg, 1700℃ , 2) Tube furnace : 1500℃
▶ Dry Ovens
1) Vacuum Dry Oven : 180℃, 2) Dty Oven : 250℃

Equipment
주요장비