¢º RF/DC Magnetron Sputtering System
Model : KVS - 660. 2" Target, 3 Guns, Sunstrate Temp.: 800¡É
Ceramic and Metal Thin-Film Deposition
¢º Thermal Evaporator
Model : KVT - 460. 3" Target, Substrate Temp. : 800¡É
Ceramic and Metal Thin- Film Deposition
¢º Press
Model : Carver 3912.
Uniaxial Cold Press : Power Sample Formation
¢º Climatic Chmaber
Model : VC 4018, Temp. : -40 ~ 180¡É
Relative Humidity : 0 ~ 99%, Various Environments tests
¢º Impedance Analyzer
Model : Solatrin 1260A, Frequency : 5 mHz ~ 30 MHz ; AC Electrical
Conductivity Measurements and Interfacial Charaterization
¢º Four Point Probe
Model : CMT- SR1000N
Measurements for Sheet Resistance of Thin/Thick Films
¢º Electric Furnaces
1) Box Furnace : Lindberg, 1700¡É , 2) Tube furnace : 1500¡É
¢º Dry Ovens
1) Vacuum Dry Oven : 180¡É, 2) Dty Oven : 250¡É
Equipment
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